Contact : Laurent VALLIER tel : (+ 33) 4 38 78 99 14
Aim of the work
The scientific activities focus on the development of the nanotechnologies involved in the elaboration of nanoelectronic devices. The on-going research program.
Mainly based on the experimental field, the research activity is strongly related to the micro-nanoelectronic environment of Grenoble area. All experimental set-ups are installed on the CEA site, in the 200/300 mm clean room facility of LETI.. The research group is operating their own plasma etching platforms that are actual industrial tools but reconfigured to host either plasma or surface diagnostics ; when available, in situ diagnostic are installed to monitor and analyse plasma processes in real-time. Thanks to this unique capability, the group is working on actual wafers a step ahead of industrial application making a link between the academic and the production worlds. The work performed for the last years has strengthened many collaborations, not only with local partners like the Alliance (STM, NXP, Freescale) and LETI, but also in Europe in the frame of European projects, and with overseas companies involved either in IC’s production (Hitachi, TSMC) or in equipment supply (Applied Materials).
